US 11,938,563 B2
Annealed workpiece manufacturing method, laser anneal base stage, and laser anneal processing apparatus
Suk-Hwan Chung, Kanagawa (JP)
Assigned to JSW AKTINA SYSTEM CO., LTD., Kanagawa (JP)
Appl. No. 16/342,151
Filed by JSW AKTINA SYSTEM CO., LTD., Yokohama (JP)
PCT Filed Oct. 10, 2017, PCT No. PCT/JP2017/036656
§ 371(c)(1), (2) Date Apr. 15, 2019,
PCT Pub. No. WO2018/074281, PCT Pub. Date Apr. 26, 2018.
Claims priority of application No. 2016-205777 (JP), filed on Oct. 20, 2016.
Prior Publication US 2019/0255650 A1, Aug. 22, 2019
Int. Cl. B23K 26/10 (2006.01); B23K 26/08 (2014.01); B23K 26/082 (2014.01); H01L 21/20 (2006.01); H01L 21/268 (2006.01); H01L 21/683 (2006.01)
CPC B23K 26/103 (2013.01) [B23K 26/082 (2015.10); B23K 26/083 (2013.01); H01L 21/20 (2013.01); H01L 21/268 (2013.01); H01L 21/683 (2013.01)] 5 Claims
OG exemplary drawing
 
1. An annealed workpiece manufacturing method of irradiating a workpiece with laser light and annealing the workpiece, the method comprising:
a support step of supporting the workpiece, wherein in the support step, at least in a laser light irradiation area of the workpiece on which laser light having a line beam shape is irradiated, the workpiece is supported by a plurality of cam members arranged along a long axis direction of the laser light;
an irradiation step of irradiating the supported workpiece with the laser light;
a measurement step of measuring a height position of the workpiece along the long axis direction of the laser light in the laser light irradiation area; and
a height position adjustment step of determining a rotation position of each cam member, based on the measured height position,
wherein:
an upper end height position of each of the cam members is adjustable according to the rotation position thereof,
the rotation position of each of the cam members or of each group including a plurality of the cam members is independently controllable,
each cam member includes a blower that causes gas blown from the cam member to come into contact with a lower surface of the workpiece on an immediately upper side of the cam member, irrespective of the rotation position of the cam member,
in the irradiation step, the workpiece is irradiated, while relatively being scanned, with the laser light, and
in the support step, accompanied by relative scanning with the laser light, the workpiece, at least in the laser light irradiation area, is supported by gas floating caused by the cam members.