US 11,938,561 B2
Laser processing apparatus
Izuru Nakai, Osaka (JP); Takaaki Kassai, Osaka (JP); and Takayuki Yoshida, Shiga (JP)
Assigned to PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD., Osaka (JP)
Filed by Panasonic Intellectual Property Management Co., Ltd., Osaka (JP)
Filed on Apr. 16, 2021, as Appl. No. 17/232,412.
Claims priority of application No. 2020-082637 (JP), filed on May 8, 2020.
Prior Publication US 2021/0346984 A1, Nov. 11, 2021
Int. Cl. B23K 26/0622 (2014.01); B23K 26/064 (2014.01); B23K 26/067 (2006.01)
CPC B23K 26/0622 (2015.10) [B23K 26/064 (2015.10); B23K 26/067 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A laser processing apparatus comprising:
a light source including a laser oscillator that is configured to emit laser light;
a power supply that is configured to supply a current to the light source;
a deflection unit that is positioned on an optical path of the laser light emitted from the light source, the deflection unit including: (i) an acousto-optic element (AOM) that is configured to change an amount of transmission of the laser light to deflect at least a part of the laser light; and (ii) and an AOM driver that is configured to input a signal into the AOM;
an optical separation unit that is positioned on the optical path of the laser light passing through the deflection unit, configured to shield higher-order light that is included in the laser light and deflected by the AOM in the deflection unit, and configured to transmit zero-order light that is included in the laser light and passes through the deflection unit; and
a signal synchronization circuit that is configured to: (i) control the power supply to selectively turn the current off in synchronization with a timing at which both the higher-order light and the zero-order light are deflected by the AOM; (ii) input a power supply modulation signal to the power supply; and (iii) input an AOM driver modulation signal to the AOM driver,
wherein the optical separation unit includes a mirror configured to reflect both the higher-order light and the zero-order light, and a damper configured to shield the higher-order light.