US 11,938,522 B2
Module for chemically processing a substrate
Andreas Gleissner, Döbriach (AT); Herbert Ötzlinger, Hallwang (AT); Raoul Schröder, Neuenstein (DE); and Oliver Knoll, Salzburg (AT)
Assigned to SEMSYSCO GMBH, Salzburg (AT)
Appl. No. 17/787,876
Filed by SEMSYSCO GMBH, Salzburg (AT)
PCT Filed Dec. 1, 2020, PCT No. PCT/EP2020/084037
§ 371(c)(1), (2) Date Jun. 21, 2022,
PCT Pub. No. WO2021/121949, PCT Pub. Date Jun. 24, 2021.
Claims priority of application No. 19218508 (EP), filed on Dec. 20, 2019.
Prior Publication US 2023/0226578 A1, Jul. 20, 2023
Int. Cl. B08B 3/02 (2006.01); B08B 3/08 (2006.01); B08B 3/12 (2006.01); H01L 21/67 (2006.01)
CPC B08B 3/02 (2013.01) [B08B 3/08 (2013.01); B08B 3/12 (2013.01); B08B 2203/02 (2013.01); H01L 21/67057 (2013.01); H01L 21/67086 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A module for chemically processing a substrate, comprising:
an immersion chamber,
a spray unit, and
a motion unit,
wherein the immersion chamber is configured to receive a first liquid and the substrate, so that the substrate is immersed in the first liquid,
wherein the spray unit comprises a plurality of spray nozzles, which are configured to spray a second liquid within the immersion chamber,
wherein the motion unit is configured to provide a relative motion between the substrate and the spray unit, and
wherein the spray unit extends along the substrate to be processed such that the second liquid is sprayed on the substrate substantially in a thickness direction of the substrate,
wherein the plurality of spray nozzles of the spray unit are arranged in several rows in the immersion chamber along a height direction of the immersion chamber, and wherein the spray nozzles are at least partially arranged in a wall of the immersion chamber.