US 11,938,512 B2
In situ polymerization of para-xylene for production of parylene F-like coating
John Janik, Raleigh, NC (US); Sean Clancy, Apex, NC (US); and Benjamin Lawrence, Salt Lake City, UT (US)
Filed by HZO, Inc., Morrisville, NC (US)
Filed on Nov. 4, 2019, as Appl. No. 16/673,810.
Prior Publication US 2021/0129180 A1, May 6, 2021
Int. Cl. B05D 3/00 (2006.01); B05D 1/00 (2006.01); C09D 165/04 (2006.01)
CPC B05D 1/62 (2013.01) [C09D 165/04 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A method for depositing coating onto a substrate, comprising:
providing a monomer for creation of a protective coating on a substrate, wherein the monomer comprises one of: 1,4-Bis(1-methoxyethyl)benzene; 1,4-bis(a-methoxyethyl) benzene; 2,5--dimethoxyethylbenzene; 1,4-Bis(1-mthoxypropyl)benzene; 1,4-Bis(1-methoxy--2—methylpropyl)benzene; 1,4-Bis(1-methoxybutyl)benzene; 1-(1-methoxyethyl)-4-(1-methoxybutyl)benzene; 1-(1-methoxymethyl); 4-(1-methoxy-2-methylpropyl)benzene; 1-(1-methoxyethyl)-4-(1-methoxy-2-methylpropyl)benzene; 1-(1-methoxymethyl)-4-(1-methoxy-1-phenylmethyl)benzene; 1-(1-methoxyethyl)-4-(1-methoxy-1-phenylmethyl)benzene; 1-(1-methoxy-2-methylpropyl)-4-(1-methoxy-1-phenylmethyl)benzene; 1-(1-methoxymethyl)-4-(1-methoxy-1-tolylmethyl)benzene or 1,4-Bis(1-methoxy-1-phenylmethyl)benzene;
energizing the monomer with a plasma generation system; and
polymerizing the energized monomer onto the substrate in a plasma-enhanced chemical vapor deposition (PECVD) chamber to form a coating, wherein the monomer is energized before entering the PECVD chamber, and
wherein the monomer polymerizes by step-growth polymerization.