US 11,938,481 B2
Microfluidic substrate, microfluidic chip and micro total analysis system
Qingzhao Liu, Beijing (CN); and Shuilang Dong, Beijing (CN)
Assigned to BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
Appl. No. 17/256,077
Filed by BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
PCT Filed Jun. 3, 2020, PCT No. PCT/CN2020/094124
§ 371(c)(1), (2) Date Dec. 24, 2020,
PCT Pub. No. WO2020/248881, PCT Pub. Date Dec. 17, 2020.
Claims priority of application No. 201910497302.7 (CN), filed on Jun. 10, 2019.
Prior Publication US 2021/0268505 A1, Sep. 2, 2021
Int. Cl. G01N 21/59 (2006.01); B01L 3/00 (2006.01)
CPC B01L 3/502784 (2013.01) [B01L 3/502715 (2013.01); G01N 21/59 (2013.01); B01L 2300/0627 (2013.01); B01L 2300/0645 (2013.01); B01L 2300/161 (2013.01); B01L 2400/0439 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A microfluidic substrate, comprising
a substrate;
an ultrasonic structure on the substrate and comprising a first electrode layer and a material layer that are arranged in sequence in a direction away from the substrate,
a second electrode layer on the substrate, wherein the second electrode layer comprises a plurality of second electrodes spaced apart from each other, and each of the plurality of second electrodes are configured to, when being applied with a second voltage, control a droplet on a respective one of the plurality of second electrodes to be split, wherein
the first electrode layer comprises a plurality of first electrodes spaced apart from each other,
the ultrasonic structure is configured to generate ultrasonic waves when a first voltage is applied to a corresponding one of the plurality of first electrodes, so as to vibrate the droplet during a splitting process of the droplet, and
wherein the plurality of first electrodes and the plurality of second electrodes are in a same layer, are made of a same material, and are alternately arranged.