CPC B01L 3/502784 (2013.01) [B01L 3/502715 (2013.01); G01N 21/59 (2013.01); B01L 2300/0627 (2013.01); B01L 2300/0645 (2013.01); B01L 2300/161 (2013.01); B01L 2400/0439 (2013.01)] | 13 Claims |
1. A microfluidic substrate, comprising
a substrate;
an ultrasonic structure on the substrate and comprising a first electrode layer and a material layer that are arranged in sequence in a direction away from the substrate,
a second electrode layer on the substrate, wherein the second electrode layer comprises a plurality of second electrodes spaced apart from each other, and each of the plurality of second electrodes are configured to, when being applied with a second voltage, control a droplet on a respective one of the plurality of second electrodes to be split, wherein
the first electrode layer comprises a plurality of first electrodes spaced apart from each other,
the ultrasonic structure is configured to generate ultrasonic waves when a first voltage is applied to a corresponding one of the plurality of first electrodes, so as to vibrate the droplet during a splitting process of the droplet, and
wherein the plurality of first electrodes and the plurality of second electrodes are in a same layer, are made of a same material, and are alternately arranged.
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