US 11,937,511 B2
Multifunction magnetic and piezoresistive MEMS pressure sensor
Majid Khan, Sunnyvale, CA (US); Roberto M. Ribeiro, San Jose, CA (US); and Savas Gider, San Jose, CA (US)
Assigned to Apple Inc., Cupertino, CA (US)
Filed by Apple Inc., Cupertino, CA (US)
Filed on Feb. 13, 2023, as Appl. No. 18/109,180.
Application 18/109,180 is a division of application No. 17/030,275, filed on Sep. 23, 2020, granted, now 11,605,774.
Prior Publication US 2023/0189654 A1, Jun. 15, 2023
Int. Cl. H10N 30/20 (2023.01); G01L 1/16 (2006.01); G01L 1/18 (2006.01); G01L 9/00 (2006.01); G01L 19/00 (2006.01); G01S 3/781 (2006.01); H10N 30/00 (2023.01); H10N 30/88 (2023.01)
CPC H10N 30/88 (2023.02) [G01L 1/167 (2013.01); G01L 1/183 (2013.01); G01L 9/0055 (2013.01); G01L 19/0092 (2013.01); G01S 3/781 (2013.01); H10N 30/1071 (2023.02); H10N 30/2047 (2023.02); B81B 2201/0264 (2013.01); B81B 2201/032 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A pressure-sensing device, the device comprising:
a housing including a membrane;
one or more piezoresistive elements disposed on the membrane and configured to sense a displacement due to a deflection of the membrane;
a first set of electrodes disposed over the membrane; and
a second set of electrodes disposed on a permeable port of the device at a distance from the membrane,
wherein the first set of electrodes and the second set of electrodes form an electrostatic actuator configured to exert a repulsive force onto the membrane to reduce the deflection of the membrane.