CPC H03H 9/25 (2013.01) [H03H 9/02574 (2013.01); H03H 9/02834 (2013.01); H03H 9/6406 (2013.01)] | 20 Claims |
1. An acoustic wave resonator comprising:
a piezoelectric layer;
an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode having a central region and first and second edge regions on opposing sides of the central region;
a temperature compensation layer over the interdigital transducer electrode; and
a velocity reduction cover extending over at least a portion of the central region of the interdigital transducer electrode and over at least a portion of the temperature compensation layer, the velocity reduction cover arranged to cause a velocity of an acoustic wave generated by the acoustic wave resonator to be reduced, the velocity reduction cover having a multilayer structure including a first sublayer at least partially located over the central region and disposed over the first and second edge regions, and a second sublayer that extends parallel to the first sublayer and is located only over the first and second edge regions of the interdigital transducer electrode.
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