US 11,936,361 B2
Transversely-excited film bulk acoustic resonators
Viktor Plesski, Gorgier (CH); Bryant Garcia, Belmont, CA (US); Julius Koskela, Helsinki (FI); and Patrick Turner, San Bruno, CA (US)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on May 18, 2021, as Appl. No. 17/323,961.
Application 17/323,961 is a continuation of application No. 16/944,831, filed on Jul. 31, 2020, granted, now 11,114,996.
Application 16/944,831 is a continuation of application No. 16/779,255, filed on Jan. 31, 2020, granted, now 10,826,462, issued on Nov. 3, 2020.
Application 16/779,255 is a continuation in part of application No. 16/578,811, filed on Sep. 23, 2019, granted, now 10,637,438, issued on Apr. 28, 2020.
Application 16/578,811 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Claims priority of provisional application 62/926,181, filed on Oct. 25, 2019.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Claims priority of provisional application 62/685,825, filed on Jun. 15, 2018.
Prior Publication US 2021/0273627 A1, Sep. 2, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/02 (2006.01); H03H 3/04 (2006.01); H03H 9/13 (2006.01); H03H 9/54 (2006.01)
CPC H03H 9/02338 (2013.01) [H03H 3/04 (2013.01); H03H 9/02228 (2013.01); H03H 9/02559 (2013.01); H03H 9/132 (2013.01); H03H 9/547 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic resonator device comprising:
a piezoelectric plate, a portion of the piezoelectric plate forming a diaphragm, a thickness of the piezoelectric plate is greater than or equal to 300 nm and less than or equal to 500 nm; and
an interdigital transducer (IDT) with interleaved fingers of the IDT on the diaphragm, the piezoelectric plate and the IDT configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the diaphragm.