CPC H01L 28/55 (2013.01) [H01L 28/60 (2013.01); H10N 70/041 (2023.02); H10N 70/24 (2023.02); H10N 70/841 (2023.02); H10N 70/8836 (2023.02)] | 8 Claims |
1. A memcapacitor comprising:
a first electrode that includes Nb-doped SrTiO3;
a second electrode disposed on the first electrode; and
a dielectric thin film comprising SrMnO3 disposed between the first electrode and the second electrode, and having a variable dielectric constant depending on a voltage applied between the first electrode and the second electrode,
wherein a lattice constant of the first electrode is greater than an intrinsic lattice constant of the dielectric thin film,
wherein the variable dielectric constant includes at least three dielectric constants, and
wherein the dielectric thin film is epitaxially grown on the first electrode and receives a tensile force from the first electrode so that the dielectric thin film, as epitaxially grown on the first electrode, has a lattice constant which is extended as compared with the intrinsic lattice constant of the dielectric thin film.
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