CPC H01J 37/32183 (2013.01) [H01J 2237/334 (2013.01)] | 31 Claims |
24. A non-transitory computer-readable medium storing instructions, the instructions comprising:
controlling a first RF generator to output a first RF output signal; and
generating a control signal, the control signal varying an electrical characteristic of the first RF output signal in accordance with a portion of the negative voltage segment of a second RF output signal from a second RF power source, and
wherein the electrical characteristic includes at least one of a power of the first RF output signal or a frequency of the first RF output signal.
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