US 11,935,726 B2
High speed synchronization of plasma source/bias power delivery
Aaron T. Radomski, Conesus, NY (US); Benjamin J. Gitlin, Rochester, NY (US); Larry J. Fisk, II, Fairport, NY (US); Mariusz Oldziej, Avon, NY (US); Aaron M. Burry, Ontario, NY (US); Jonathan W. Smyka, Rochester, NY (US); Alexei Marakhtanov, Albany, CA (US); Bing Ji, Pleasanton, CA (US); Felix Leib Kozakevich, Sunnyvale, CA (US); John Holland, San Jose, CA (US); and Ranadeep Bhowmick, San Jose, CA (US)
Assigned to MKS Instruments, Inc., Andover, MA (US)
Filed by MKS Instruments, Inc., Andover, MA (US); and LAM RESEARCH CORPORATION, Fremont, CA (US)
Filed on Sep. 21, 2021, as Appl. No. 17/480,993.
Application 17/480,993 is a continuation of application No. 16/452,716, filed on Jun. 26, 2019, granted, now 11,158,488.
Prior Publication US 2022/0005674 A1, Jan. 6, 2022
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32183 (2013.01) [H01J 2237/334 (2013.01)] 31 Claims
OG exemplary drawing
 
24. A non-transitory computer-readable medium storing instructions, the instructions comprising:
controlling a first RF generator to output a first RF output signal; and
generating a control signal, the control signal varying an electrical characteristic of the first RF output signal in accordance with a portion of the negative voltage segment of a second RF output signal from a second RF power source, and
wherein the electrical characteristic includes at least one of a power of the first RF output signal or a frequency of the first RF output signal.