US 11,933,922 B2
Superconducting multi-layer transition-edge sensor and hybrid subtractive-additive production of a superconducting multi-layer transition-edge sensor
Daniel Richard Schmidt, Boulder, CO (US); and Joel Calvin Weber, Boulder, CO (US)
Assigned to GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCE, Gaithersburg, MD (US)
Filed by Government of the United States of America, as represented by the Secretary of Commerce, Gaithersburg, MD (US)
Filed on Mar. 5, 2021, as Appl. No. 17/192,943.
Claims priority of provisional application 62/985,406, filed on Mar. 5, 2020.
Prior Publication US 2021/0278551 A1, Sep. 9, 2021
Int. Cl. H10N 60/01 (2023.01); G01T 1/16 (2006.01); G03F 7/00 (2006.01)
CPC G01T 1/16 (2013.01) [G03F 7/0035 (2013.01); H10N 60/0128 (2023.02)] 18 Claims
OG exemplary drawing
 
1. A process for hybrid subtractive-additive production of a superconducting multi-layer transition-edge sensor, the process comprising:
forming a superconductor layer on a substrate, the superconductor layer comprising a nascent topography;
forming a patterning photoresist on the superconductor layer such that the superconductor layer is interposed between the patterning photoresist and the substrate;
forming a sensor pattern in the patterning photoresist and exposing an exposed portion of the superconductor layer for removal;
subtractively forming, from the superconductor layer, the superconductor sensor layer comprising the sensor pattern by removing the exposed portion from the superconductor layer;
removing the patterning photoresist from the superconductor sensor layer;
forming a template photoresist on the superconductor sensor layer such that the superconductor sensor layer is interposed between the template photoresist and the substrate;
forming an inverse normal metal layer pattern in the template photoresist and exposing a bilayer portion of the superconductor sensor layer for addition of a normal metal layer; and
additively forming the normal metal layer comprising a normal metal pattern on the superconductor sensor layer such that the sensor pattern is interposed between the normal metal layer and the substrate to produce the superconducting multi-layer transition-edge sensor.