US 11,933,810 B2
Z-axis resonant accelerometer with improved-performance detection structure
Valentina Zega, Milan (IT); Gabriele Gattere, Castronno (IT); Attilio Alberto Frangi, Milan (IT); Andrea Opreni, Terno d'Isola (IT); and Manuel Riani, Como (IT)
Assigned to STMICROELECTRONICS S.R.L., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.R.L., Agrate Brianza (IT)
Filed on Sep. 8, 2022, as Appl. No. 17/930,689.
Claims priority of application No. 102021000023795 (IT), filed on Sep. 15, 2021.
Prior Publication US 2023/0082421 A1, Mar. 16, 2023
Int. Cl. G01P 15/097 (2006.01); G01P 15/08 (2006.01); G01P 15/125 (2006.01); G01P 15/18 (2013.01)
CPC G01P 15/097 (2013.01) [G01P 15/0802 (2013.01); G01P 15/125 (2013.01); G01P 15/18 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A detection structure for a vertical axis resonant accelerometer, the detection structure comprising:
a substrate;
an inertial mass suspended above the substrate and having a plane of main extension defined by first and second horizontal axes, the vertical axis being transverse to the plane;
a window in the inertial mass, the window extending throughout a thickness of the inertial mass;
a main anchorage coupled to the inertial mass and arranged in the window;
first and second anchoring elastic elements coupled to the main anchorage and the substrate, the first and second anchoring elastic elements being of a torsional type with longitudinal extensions on opposite sides of the main anchorage, the first and second anchoring elastic elements being configured to rotate the inertial mass about a rotation axis parallel to the second horizontal axis;
a first resonant element having a longitudinal extension along the first horizontal axis;
a first auxiliary anchoring element having a longitudinal extension along the first horizontal axis, and extending below the first resonant element; and
a first constraint element in the window, suspended above the substrate, and fixedly coupled to the substrate through the first auxiliary anchoring element, the first auxiliary anchoring element being coupled between the first constraint element and the main anchorage, the first resonant element being coupled between the first anchoring elastic element and the first constraint element.