US D1,017,561 S
Nozzle holder of substrate processing apparatus
Hironori Shimada, Toyama (JP)
Assigned to KOKUSAI ELECTRIC CORPORATION, Tokyo (JP)
Filed by KOKUSAI ELECTRIC CORPORATION, Tokyo (JP)
Filed on Sep. 21, 2021, as Appl. No. 29/808,585.
Claims priority of application No. 2021-005832 D (JP), filed on Mar. 22, 2021.
Term of patent 15 Years
LOC (14) Cl. 13 - 03
U.S. Cl. D13—182
OG exemplary drawing
 
The ornamental design for a nozzle holder of substrate processing apparatus, as shown and described.