US 11,929,734 B2
Surface acoustic wave resonator with piston mode design and electrostatic discharge protections
Volker Schulz, Munich (DE); and Philipp Michael Jaeger, Munich (DE)
Assigned to RF360 Singapore Pte. Ltd., Republic Plaza (SG)
Filed by RF360 SINGAPORE PTE, LTD., Singapore (SG)
Filed on Jan. 29, 2021, as Appl. No. 17/161,999.
Prior Publication US 2022/0247379 A1, Aug. 4, 2022
Int. Cl. H03H 9/25 (2006.01); H03H 3/08 (2006.01); H03H 9/02 (2006.01); H03H 9/145 (2006.01); H03H 9/64 (2006.01)
CPC H03H 9/25 (2013.01) [H03H 3/08 (2013.01); H03H 9/02842 (2013.01); H03H 9/02984 (2013.01); H03H 9/14541 (2013.01); H03H 9/6406 (2013.01)] 29 Claims
OG exemplary drawing
 
1. An electroacoustic device, comprising:
a piezoelectric material;
a first electrode structure disposed above the piezoelectric material, the first electrode structure comprising first electrode fingers arranged within an active region having a first region and a second region, wherein:
at least one of the first electrode fingers has at least one of a different width or a different height in the first region than in the second region; and
the first electrode fingers comprise a first electrode finger that has a width or height in the second region that is less than a corresponding width or height of the at least one of the first electrode fingers in the second region, and
a second electrode structure disposed above the piezoelectric material and disposed adjacent to the first electrode structure, the second electrode structure comprising second electrode fingers arranged within the active region, wherein:
at least one of the second electrode fingers has at least one of a different width or a different height in the first region than in the second region; and
the second electrode fingers comprise a second electrode finger disposed adjacent to the first electrode finger of the first electrode structure, and wherein:
the first electrode fingers have a first spacing between the first electrode fingers;
the second electrode fingers have a second spacing between the second electrode fingers; and
the first electrode finger is spaced from the second electrode finger by a third spacing different from the first spacing and the second spacing.