CPC H01S 3/0057 (2013.01) [B23K 26/0624 (2015.10)] | 22 Claims |
1. A method of delivering optical energy to a substrate, comprising:
applying a temporal group of optical pulses to a region of the substrate, wherein the temporal group comprises twenty or fewer pulses of a femtosecond pulse duration, arranged as a first subgroup of pulses comprising up to three pulses followed by a second subgroup of pulses comprising the remaining pulses in the temporal group; and wherein
energies of the pulses are controlled such that pulses in the first subgroup have a first energy per pulse and pulses in a second subgroup of pulses have a second energy per pulse which is less than the first energy.
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