CPC H01L 27/14643 (2013.01) [H01L 27/14612 (2013.01); H01L 27/14621 (2013.01); H01L 27/1464 (2013.01); H01L 27/14685 (2013.01); H01L 27/14689 (2013.01)] | 14 Claims |
1. An image sensor, comprising:
a substrate which comprises a first surface and a second surface opposite each other;
a plurality of pixels, each pixel comprising a photoelectric conversion layer in the substrate;
a pixel separation pattern disposed in the substrate and separating the pixels;
a first and second color filters on the second surface; and
a color filter separation structure including a first layer, a second layer on the first layer, and a third layer on the second layer; and a fourth layer on the third layer,
wherein the color filter separation structure is disposed between the first and second color filters, and
wherein the first layer includes a titanium nitride, the second layer includes a tungsten, the third layer includes a silicon oxide, and the fourth layer includes an aluminum oxide.
|