US 11,929,315 B2
Semiconductor package having pad with regular and irregular depressions and protrusions and method of manufacturing the same
Junghoon Kang, Anyang-si (KR)
Assigned to Samsung Electronics Co., Ltd., (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Nov. 16, 2021, as Appl. No. 17/527,414.
Claims priority of application No. 10-2021-0054079 (KR), filed on Apr. 27, 2021.
Prior Publication US 2022/0344252 A1, Oct. 27, 2022
Int. Cl. H01L 23/498 (2006.01); H01L 23/31 (2006.01); H01L 23/00 (2006.01)
CPC H01L 23/49838 (2013.01) [H01L 23/3128 (2013.01); H01L 23/49822 (2013.01); H01L 23/49894 (2013.01); H01L 24/16 (2013.01); H01L 2224/16227 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A semiconductor package, comprising:
a redistribution substrate having a lower surface and an upper surface opposite to the lower surface, the redistribution substrate including:
a pad adjacent to the lower surface thereof, the pad having a first surface and a second surface opposite to the first surface, and
a redistribution layer electrically connected to the pad;
a semiconductor chip on the upper surface of the redistribution substrate and electrically connected to the redistribution layer;
an encapsulant encapsulating at least a portion of the semiconductor chip;
a protective layer on the lower surface of the redistribution substrate and having an opening exposing at least a portion of the first surface of the pad; and
a connection bump on the protective layer, the connection bump is in contact with the portion of the first surface of the pad through the opening of the protective layer,
wherein the portion of the first surface exposed through the opening includes:
a recess surface, the recess surface including depressions and protrusions and being depressed inwardly toward the second surface, the depressions and protrusions including a groove extending in a ring shape on a plane parallel to the first surface of the pad, and
an edge surface, the edge surface and having a step difference with respect to the recess surface.