US 11,929,276 B2
Modular material handling robot platform
Martin Hosek, Lowell, MA (US); and Sripati Sah, Wakefield, MA (US)
Assigned to Persimmon Technologies Corporation, Wakefield, MA (US)
Filed by Persimmon Technologies, Corp., Wakefield, MA (US)
Filed on Feb. 12, 2020, as Appl. No. 16/788,973.
Claims priority of provisional application 62/805,532, filed on Feb. 14, 2019.
Prior Publication US 2020/0262060 A1, Aug. 20, 2020
Int. Cl. H01L 21/677 (2006.01); B25J 5/02 (2006.01); B25J 9/00 (2006.01); B25J 19/00 (2006.01); B25J 9/12 (2006.01); B25J 11/00 (2006.01)
CPC H01L 21/67709 (2013.01) [B25J 5/02 (2013.01); B25J 9/0009 (2013.01); B25J 19/0045 (2013.01); B25J 9/123 (2013.01); B25J 11/0095 (2013.01); H01L 21/67706 (2013.01); H01L 21/67742 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a first base plate, where the first base plate is configured to have at least one of at least one linear drive component or at least one power coupling component connected to a top side of the first base plate, where the first base plate is configured to be located inside a vacuum chamber; and
a plurality of transport guides on the top side of the first base plate;
where an end of the first base plate comprises at least one alignment feature configured to align an end of the first base plate to an end of a second base plate, where the first base plate comprises a seal between an inside of the vacuum chamber and an outside of the vacuum chamber, where the first base plate is configured to provide, in combination with the second base plate, a structural platform inside the vacuum chamber for a robot drive to move in the vacuum chamber along the plurality of transport guides.