CPC H01J 37/32183 (2013.01) [C23C 16/505 (2013.01); H01J 2237/327 (2013.01)] | 20 Claims |
1. A method of tuning during a plasma process providing processing gas through a showerhead, the method comprising:
receiving, by a controller, tuning parameter information from each matching network of multiple matching networks, wherein each matching network of the multiple matching networks couples a radio frequency (RF) power source to one of multiple connection points of an electrode;
determining a tuning sequence for the multiple matching networks based on the tuning parameter information received by the controller; and
tuning one of the multiple matching networks while simultaneously locking each remaining matching networks of the multiple matching networks.
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