CPC H01J 37/32082 (2013.01) [H01J 37/32568 (2013.01); H01J 37/32935 (2013.01)] | 15 Claims |
1. A method of adjusting an output power of a power supply supplying electrical power to a plasma in a plasma chamber, the method comprising:
connecting the power supply to at least one electrode in the plasma chamber;
transporting one or more substrates relative to the electrode using a substrate carrier;
maintaining the plasma by the electrical power;
processing the one or more substrates with the plasma; and
adjusting the output power based on a parameter related to a distance between a surface of the electrode facing a carrier-substrate-assembly and a surface of the substrate-carrier-assembly facing the electrode.
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