CPC G03F 1/62 (2013.01) [G03F 7/11 (2013.01); G03F 7/2004 (2013.01)] | 20 Claims |
1. A pellicle for extreme ultraviolet lithography, comprising:
a pellicle layer including a core layer containing yttrium carbide, and a capping layer formed over one or both surfaces of the core layer; and
a substrate configured to support the pellicle layer,
wherein the yttrium carbide is YCx in which an atomic percentage of carbon is within a range of 25% to 45%.
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