US 11,927,873 B2
Method of scanning an optical beam using an acousto-optic deflector driven by chirped acoustic signals
Gergely Katona, Budapest (HU); András Fehér, Szekszárd (HU); Máté Veress, Budapest (HU); Pál Maák, Budapest (HU); Gergely Szalay, Budapest (HU); Balázs Chiovini, Kecskemét (HU); Zoltán Szadai, Jászboldogháza (HU); Linda Sulcz-Judák, Akasztó (HU); and Balázs József Rózsa, Budapest (HU)
Assigned to Femtonics Kft., Budapest (HU)
Appl. No. 17/268,199
Filed by Femtonics Kft., Budapest (HU)
PCT Filed Aug. 14, 2019, PCT No. PCT/HU2019/050039
§ 371(c)(1), (2) Date Feb. 12, 2021,
PCT Pub. No. WO2020/035710, PCT Pub. Date Feb. 20, 2020.
Claims priority of application No. P1800286 (HU), filed on Aug. 14, 2018.
Prior Publication US 2021/0318590 A1, Oct. 14, 2021
Int. Cl. G02F 1/33 (2006.01); G01N 21/64 (2006.01)
CPC G02F 1/33 (2013.01) [G01N 21/645 (2013.01); G01N 2021/6463 (2013.01); G01N 2201/106 (2013.01)] 20 Claims
OG exemplary drawing
 
1. Method for scanning with an optical beam (50) using a first acousto-optic deflector (15, 15′) having an optical axis along a Z-axis and at least one acousto-optic crystal layer (14), characterised by directing the optical beam (50) into the first acousto-optic deflector (15, 15′), and deflecting the optical beam (50) along an X-axis being perpendicular to the Z-axis by means of the first acousto-optic deflector (15, 15′), during which a plurality of acoustic chirp signals (30) are generated in the at least one acousto-optic crystal layer (14) of the acousto-optic deflector (15, 15′) by
generating a first acoustic chirp signal (30a) having a time duration of τ in the acousto-optic crystal layer (14) using a single electro-acoustic wave generator (17) connected to the crystal layer (14) by applying a first voltage signal to the electro-acoustic wave generator, then
generating a second acoustic chirp signal (30b) in the acousto-optic crystal layer (14) within a τ period of time counted from the start of the generation of the first acoustic chirp signal (30a) by applying a second voltage signal to the electro-acoustic wave generator while the first acoustic chirp signal (30a) is generated;
wherein said acoustic chirp signals (30a, 30b) are at least partially overlapping in the crystal layer (14).