CPC G01K 7/13 (2013.01) [G01L 1/2281 (2013.01)] | 7 Claims |
1. A sensor, comprising:
a metal object; and
a thin film stack formed on at least a part of a surface of the metal object, wherein the thin film stack comprises:
an electrically isolating film;
a metallic film on the electrically isolating film, wherein a first electrical conductor is defined in the metallic film, wherein the metallic film is composed of a different metal alloy than the metal object, wherein the first electrical conductor is electrically isolated from the metal object by means of the electrically isolated film, and wherein the first electrical conductor comprises:
in a first end of the first electrical conductor, a first connection point connected to a first terminal via a first wire; and
in a second end of the first electrical conductor, a sensor structure defined in the metallic film, said sensor structure comprising a junction of the metallic film penetrating the electrically isolating film to the metal object, whereby a thermocouple is formed;
wherein a metal object terminal is connected to a connection point of the metal object via a second wire, and
wherein the first connection point of the first electrical conductor and the connection point of the metal object are configured to be adjacent to each other and in an isothermal relation with each other.
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