| CPC G01C 19/5712 (2013.01) | 20 Claims |
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1. A microelectromechanical device, comprising:
a first sensing mass and a second sensing mass coupled to an anchor along a first axis, both movable according to the first axis and each movable according to a respective second axis, perpendicular to the first axis;
a driving device configured to maintain the first sensing mass and the second sensing mass in oscillation along the first axis in phase opposition; and
control circuitry coupled to the driving device, the control circuitry configured to:
sense a first force information from the first sensing mass, the first force information including information associated with at least one of acceleration force, Centrifugal force, Euler force, or Coriolis force with respect to the first axis, and a second axis perpendicular to the first axis, and a third axis perpendicular to both the first axis and the second axis;
output the first force information from the first sensing mass as a first output to a first time delay circuitry;
apply time delay to the first output using the first time delay circuitry to generate a second output; and
add the first output and the second output using a first adding circuitry coupled to the first time delay circuitry to generate a third output,
wherein the third output only includes the first force information associated with the Coriolis force.
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