CPC F16K 7/123 (2013.01) [F16K 25/005 (2013.01); F16K 37/0041 (2013.01)] | 11 Claims |
1. A diaphragm valve comprising:
a valve body that defines a flow path through which a fluid flows and an opening that opens to the outside in a middle of the flow path;
a flexible partition member that covers the opening and separates the flow path from the outside, and changes a cross-sectional area of the flow path;
a flexible support member disposed on a rear surface side opposite to a flow path side of the flexible partition member;
a housing fixed to the valve body via peripheral portions of the flexible partition member and the flexible support member; and
a humidity sensor that detects a humidity of an atmosphere or a change thereof in a space defined by the flexible support member and an inner surface of the housing, wherein
the humidity sensor has a flat plate shape having a hole in a center and is disposed on a ceiling of said space, or
the humidity sensor is disposed on a surface of a compressor between the flexible support member and the compressor.
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