US 11,927,280 B2
Diaphragm valve and monitoring method thereof with improved leak detection
Yuya Suzuki, Osaka (JP); Ryutaro Tanno, Osaka (JP); Daihi Tsuchiguchi, Osaka (JP); Nobuo Nakamura, Osaka (JP); and Tsutomu Shinohara, Osaka (JP)
Assigned to FUJIKIN INCORPORATED, Osaka (JP)
Appl. No. 16/972,717
Filed by FUJIKIN INCORPORATED, Osaka (JP)
PCT Filed May 17, 2019, PCT No. PCT/JP2019/019635
§ 371(c)(1), (2) Date Dec. 7, 2020,
PCT Pub. No. WO2020/003799, PCT Pub. Date Jan. 2, 2020.
Claims priority of application No. 2018-125652 (JP), filed on Jun. 30, 2018.
Prior Publication US 2021/0262576 A1, Aug. 26, 2021
Int. Cl. G01L 7/00 (2006.01); F16K 7/12 (2006.01); F16K 25/00 (2006.01); F16K 37/00 (2006.01)
CPC F16K 7/123 (2013.01) [F16K 25/005 (2013.01); F16K 37/0041 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A diaphragm valve comprising:
a valve body that defines a flow path through which a fluid flows and an opening that opens to the outside in a middle of the flow path;
a flexible partition member that covers the opening and separates the flow path from the outside, and changes a cross-sectional area of the flow path;
a flexible support member disposed on a rear surface side opposite to a flow path side of the flexible partition member;
a housing fixed to the valve body via peripheral portions of the flexible partition member and the flexible support member; and
a humidity sensor that detects a humidity of an atmosphere or a change thereof in a space defined by the flexible support member and an inner surface of the housing, wherein
the humidity sensor has a flat plate shape having a hole in a center and is disposed on a ceiling of said space, or
the humidity sensor is disposed on a surface of a compressor between the flexible support member and the compressor.