CPC C23C 4/137 (2016.01) [B05B 17/0638 (2013.01); B05B 17/0646 (2013.01); B05C 5/0208 (2013.01); B05C 13/02 (2013.01); B41J 2/015 (2013.01); B41J 2/14 (2013.01); B41J 2/16505 (2013.01); B41J 2/315 (2013.01); B41J 11/0015 (2013.01); B41J 29/393 (2013.01); B41M 5/0011 (2013.01); B41M 5/0047 (2013.01); H01L 21/67201 (2013.01); H01L 21/67784 (2013.01); H01L 33/005 (2013.01); H05B 33/10 (2013.01); B05C 15/00 (2013.01); B05D 5/00 (2013.01); B41J 2202/09 (2013.01); B41J 2202/16 (2013.01); H10K 71/00 (2023.02); H10K 71/135 (2023.02)] | 20 Claims |
1. A method for forming a film on a substrate, the method comprising:
floating a substrate on a flotation system in an isolated substrate-printing region having an inert gas environment, the flotation system comprising at least one gas inlet port and at least one gas outlet port; and
while floating the substrate in the substrate-printing region:
moving the substrate in a first direction and moving at least one print-head in a second direction, the first and second directions being substantially orthogonal to each other,
controlling a float height of the substrate using gas flow through the at least one gas inlet port and the at least one gas outlet port,
detecting a misalignment of the substrate in the first direction and in the second direction,
printing a material on a surface of the substrate using the at least one print-head; and
using the detected misalignment to control printing the material on the surface of the substrate.
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