CPC C23C 16/45525 (2013.01) [C23C 16/32 (2013.01); H01L 21/28088 (2013.01); H01L 29/49 (2013.01); H01L 29/4966 (2013.01)] | 13 Claims |
1. A thin-film structure, comprising:
a substrate;
a first metal carbide material; and
a second metal carbide material,
wherein one of the first metal carbide material and the second metal carbide material comprises crystallites embedded within an amorphous film, and
wherein the other of the first metal carbide material and the second metal carbide material has a lower resistivity than the first metal carbide material or the second metal carbide material that comprises the crystallites embedded within the amorphous film.
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