US 11,926,895 B2
Structures including metal carbide material, devices including the structures, and methods of forming same
Petri Raisanen, Gilbert, AZ (US); Michael Givens, Scottsdale, AZ (US); and Eric James Shero, Phoenix, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Jan. 25, 2022, as Appl. No. 17/583,371.
Application 16/563,473 is a division of application No. 14/752,712, filed on Jun. 26, 2015, granted, now 10,458,018, issued on Oct. 29, 2019.
Application 17/583,371 is a continuation of application No. 16/563,473, filed on Sep. 6, 2019, granted, now 11,242,598.
Prior Publication US 2022/0149175 A1, May 12, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 16/455 (2006.01); C23C 16/32 (2006.01); H01L 21/28 (2006.01); H01L 29/49 (2006.01)
CPC C23C 16/45525 (2013.01) [C23C 16/32 (2013.01); H01L 21/28088 (2013.01); H01L 29/49 (2013.01); H01L 29/4966 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A thin-film structure, comprising:
a substrate;
a first metal carbide material; and
a second metal carbide material,
wherein one of the first metal carbide material and the second metal carbide material comprises crystallites embedded within an amorphous film, and
wherein the other of the first metal carbide material and the second metal carbide material has a lower resistivity than the first metal carbide material or the second metal carbide material that comprises the crystallites embedded within the amorphous film.