CPC C23C 14/325 (2013.01) [C23C 14/0605 (2013.01); C23C 14/14 (2013.01); H01J 37/32055 (2013.01); H01J 2237/332 (2013.01)] | 17 Claims |
1. A cathode arc source comprising:
a station for a cathode target;
a first magnetic field source located between the target station and the position where a substrate is to be located;
a second magnetic field source located below the target station; and
a third magnetic field source located between the first and second magnetic field sources and having an opposite polarity to the first magnetic field source;
characterised in that the resultant magnetic field from the first, second and third magnetic field sources has zero field strength in a direction substantially normal to the target station at a position of up to 10 cm above the target, and wherein the second magnetic field source has an opposite polarity to the first magnetic field source.
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