US 11,926,485 B2
Processing system and article manufacturing method
Ryota Okazaki, Yamato (JP); Satoshi Shioda, Toda (JP); Akihiro Hayashi, Yokohama (JP); and Takeshi Akehi, Toride (JP)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Aug. 18, 2020, as Appl. No. 16/996,637.
Claims priority of application No. 2019-160755 (JP), filed on Sep. 3, 2019.
Prior Publication US 2021/0061577 A1, Mar. 4, 2021
Int. Cl. B65G 43/10 (2006.01); B65G 17/06 (2006.01)
CPC B65G 43/10 (2013.01) [B65G 17/06 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A processing system comprising:
a conveyance path including a plurality of conveyance modules configured to convey a carriage, the plurality of conveyance modules being disposed to convey the carriage to a plurality of positions;
a processing apparatus configured to perform processing on a work mounted on the carriage; and
a control unit configured to control the plurality of conveyance modules and the processing apparatus,
wherein the control unit is configured to, in performing the processing on the work at the plurality of positions by the processing apparatus, move the work to the plurality of positions by moving the carriage using the plurality of conveyance modules,
wherein the processing apparatus includes a processing tool, a processing tool driving carriage, and a processing tool conveyance path, the processing tool being configured to be moved by the processing tool driving carriage, and
wherein the processing tool conveyance path includes a coil group including a plurality of coils, the processing tool driving carriage including a permanent magnet or ferromagnetic body configured to receive electromagnetic force from the coil group of the processing tool conveyance path, the processing tool driving carriage being configured to be moved by the electromagnetic force that the permanent magnet or ferromagnetic body receives from the coil group of the processing tool conveyance path.