US 11,917,866 B2
Lift-off process for manufacturing an organic light-emitting display apparatus
Yonghoon Yang, Yongin-si (KR); and Minsuk Ko, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed on Jan. 30, 2023, as Appl. No. 18/161,836.
Application 18/161,836 is a division of application No. 17/031,813, filed on Sep. 24, 2020, granted, now 11,569,314.
Claims priority of application No. 10-2019-0159353 (KR), filed on Dec. 3, 2019.
Prior Publication US 2023/0180536 A1, Jun. 8, 2023
Int. Cl. H10K 59/122 (2023.01); H10K 50/813 (2023.01); H10K 50/822 (2023.01); H10K 50/844 (2023.01); H10K 59/30 (2023.01); H10K 59/123 (2023.01); H10K 71/00 (2023.01); H10K 71/20 (2023.01)
CPC H10K 59/122 (2023.02) [H10K 50/813 (2023.02); H10K 50/822 (2023.02); H10K 50/844 (2023.02); H10K 59/123 (2023.02); H10K 59/30 (2023.02); H10K 71/00 (2023.02); H10K 71/221 (2023.02); H10K 71/233 (2023.02)] 8 Claims
OG exemplary drawing
 
1. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
forming, on a substrate, a pixel electrode and a pixel-defining film covering an edge of the pixel electrode;
forming, on the pixel-defining film, a bank protruding in a direction away from the substrate;
sequentially forming a liftoff layer and a photoresist on the pixel electrode, the pixel-defining film, and the bank;
forming an opening by patterning the liftoff layer and the photoresist, the opening exposing the pixel-defining film located on a top surface of the pixel electrode and within the bank;
sequentially depositing an intermediate layer comprising an emission layer, a counter electrode, and a passivation layer on the opening and the photoresist; and
removing a residue of the photoresist and the liftoff layer.