US 11,916,027 B2
Isolator
Yoshihiko Fuji, Oita Oita (JP); Ryohei Nega, Yokohama Kanagawa (JP); Tatsuya Ohguro, Nonoichi Ishikawa (JP); and Takanobu Kamakura, Yokosuka Kanagawa (JP)
Assigned to KABUSHIKI KAISHA TOSHIBA, Tokyo (JP); and TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION, Tokyo (JP)
Filed by Kabushiki Kaisha Toshiba, Tokyo (JP); and Toshiba Electronic Devices & Storage Corporation, Tokyo (JP)
Filed on Sep. 10, 2020, as Appl. No. 17/016,631.
Claims priority of application No. 2020-051047 (JP), filed on Mar. 23, 2020.
Prior Publication US 2021/0296265 A1, Sep. 23, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 23/64 (2006.01); H01F 27/28 (2006.01); H01L 49/02 (2006.01)
CPC H01L 23/645 (2013.01) [H01F 27/2804 (2013.01); H01L 28/10 (2013.01); H01F 2027/2809 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An isolator, comprising:
a first electrode;
a first insulating portion provided on the first electrode;
a second electrode provided on the first insulating portion, the second electrode being electrically isolated from the first electrode and being apart from the first electrode in a first direction, the first direction being from the first electrode toward the second electrode;
a second insulating portion provided around the second electrode along a first plane perpendicular to the first direction, the second insulating portion contacting the second electrode; and
a first dielectric portion provided between the first insulating portion and the second insulating portion in the first direction, at least a portion of the first dielectric portion contacting the second electrode and being positioned around the second electrode along the first plane,
a distance in the first direction between a lowermost end of the second electrode and a first interface between the first dielectric portion and the second insulating portion being less than a distance in the first direction between the first interface and an uppermost end of the second electrode,
the first electrode and the second electrode having configurations of spiral or flat plate,
the configuration of the first electrode including a first end and a second end furthest from the first end in a second direction,
the configuration of the second electrode including a third end and a fourth end furthest from the third end in the second direction,
a first distance between the first end and the second end in the second direction being longer than a first thickness of the first electrode in the first direction,
a second distance between the third end and the fourth end in the second direction being longer than a second thickness of the second electrode in the first direction and being the same as the first distance,
the second direction is perpendicular to the first direction,
a relative dielectric constant of the first dielectric portion being greater than a relative dielectric constant of the first insulating portion and greater than a relative dielectric constant of the second insulating portion.