CPC H01L 21/043 (2013.01) [H01L 21/02425 (2013.01); H01L 21/02527 (2013.01); H01L 21/042 (2013.01); H01L 21/0415 (2013.01); H01L 21/0435 (2013.01); H01L 21/2855 (2013.01); H01L 21/28556 (2013.01); H01L 21/324 (2013.01); H01L 21/76871 (2013.01); H01L 29/1602 (2013.01); H01L 29/36 (2013.01); H01L 29/6603 (2013.01); H01L 29/868 (2013.01)] | 10 Claims |
1. A doped diamond film structure, comprising:
a polycrystalline diamond material having less than micrometer grain size;
a first set of dopant atoms positioned within at least one layer of less than 900 nm thickness of the polycrystalline diamond;
a plurality of pathways created by positioning of the first set of dopant atoms within the at least one layer of less than 900 nm thickness; and
a second set of dopant atoms larger than the first set of dopant atoms positioned within the polycrystalline diamond material at least in part by passage through the plurality of pathways.
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