US 11,915,911 B2
Two piece electrode assembly with gap for plasma control
Tien Fak Tan, Campbell, CA (US); Saravjeet Singh, Sunnyvale, CA (US); Dmitry Lubomirsky, Cupertino, CA (US); Tae Wan Kim, San Jose, CA (US); Kenneth D. Schatz, Los Altos, CA (US); Tae Seung Cho, San Jose, CA (US); and Lok Kee Loh, San Francisco, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 29, 2020, as Appl. No. 16/915,028.
Application 16/915,028 is a continuation of application No. 15/955,588, filed on Apr. 17, 2018, granted, now 10,699,879.
Prior Publication US 2020/0328065 A1, Oct. 15, 2020
Int. Cl. H01J 37/32 (2006.01); H01J 37/04 (2006.01)
CPC H01J 37/32091 (2013.01) [H01J 37/04 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus for distributing plasma products, comprising:
a first electrode characterized by a first surface and a second surface opposite the first surface, wherein the first electrode defines a plurality of first apertures extending therethrough;
a second electrode characterized by a first surface facing the second surface of the first electrode and a second surface opposite the first surface of the second electrode, wherein:
the second electrode is disposed beneath the first electrode;
the second electrode defines a plurality of apertures that are configured to permit at least one of plasma, free electrons, or ionic species to pass into a processing region that is configured to receive a substrate for processing;
the second electrode forms at least one component selected from the group consisting of a faceplate, a showerhead, an ion suppressor, and a plasma blocking screen;
the second electrode defines a plurality of second apertures extending therethrough; and
a gap distance is formed between the first electrode and the second electrode; and
one or more adjustable couplers operable to adjust one or more of translation or rotation of the first electrode with respect to the second electrode.