US 11,915,908 B2
Method for measuring a sample and microscope implementing the method
Eugen Foca, Ellwangen (DE); Amir Avishai, Pleasanton, CA (US); Dmitry Klochkov, Schwaebisch Gmuend (DE); Thomas Korb, Schwaebisch Gmuend (DE); Jens Timo Neumann, Aalen (DE); and Keumsil Lee, Palo Alto, CA (US)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Oct. 14, 2021, as Appl. No. 17/501,238.
Prior Publication US 2023/0120847 A1, Apr. 20, 2023
Int. Cl. H01J 37/24 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/24 (2013.01) [H01J 37/28 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A method for measuring a sample with a microscope, the method comprising the steps of:
measuring a tilt of the sample,
correcting an orientation of the sample based on the tilt, and
scanning the sample;
wherein the measuring step is carried out by focusing a beam on the sample and measuring the resulting focal distance.