CPC H01J 37/24 (2013.01) [H01J 37/28 (2013.01)] | 21 Claims |
1. A method for measuring a sample with a microscope, the method comprising the steps of:
measuring a tilt of the sample,
correcting an orientation of the sample based on the tilt, and
scanning the sample;
wherein the measuring step is carried out by focusing a beam on the sample and measuring the resulting focal distance.
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