US 11,915,865 B2
Drive device driving a movable portion in a vacuum chamber
Masaji Furuta, Kyoto (JP); Kei Kodera, Kyoto (JP); and Kiyoshi Watanabe, Kyoto (JP)
Assigned to SHIMADZU CORPORATION, Kyoto (JP)
Appl. No. 16/978,349
Filed by SHIMADZU CORPORATION, Kyoto (JP)
PCT Filed Dec. 4, 2018, PCT No. PCT/JP2018/044579
§ 371(c)(1), (2) Date Sep. 4, 2020,
PCT Pub. No. WO2019/171687, PCT Pub. Date Sep. 12, 2019.
Claims priority of application No. 2018-041686 (JP), filed on Mar. 8, 2018.
Prior Publication US 2021/0043350 A1, Feb. 11, 2021
Int. Cl. H01F 7/06 (2006.01); H01J 49/04 (2006.01)
CPC H01F 7/064 (2013.01) [H01J 49/0418 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A mass spectrometer comprising a drive device for driving a movable portion, the drive device comprising:
a vacuum chamber;
a sample stage provided in the vacuum chamber;
a rail that holds the movable portion to be slidable;
a movable-side magnet provided to the movable portion provided in the vacuum chamber; and
a drive unit that is provided outside the vacuum chamber, and drives the movable portion by exerting magnetic force on the movable-side magnet,
wherein the drive unit has
a first magnet that exerts magnetic force of attracting the movable-side magnet,
a second magnet that is provided to be adjacent to the first magnet, and exerts magnetic force of repelling the movable-side magnet, and
a moving mechanism that integrally moves the first magnet and the second magnet,
wherein the sample stage is connected to the movable portion.