CPC G03F 7/70508 (2013.01) [G03F 7/704 (2013.01); G03F 7/70291 (2013.01)] | 20 Claims |
1. A method for data inspection in a lithographic system, the method comprising:
obtaining a data prep bitmap from a data prep server;
optimizing the data prep bitmap at an imaging unit server to create an imaging unit server bitmap;
comparing the data prep bitmap to the imaging unit server bitmap;
processing the imaging unit server bitmap with a rasterizer to create an imaging unit bitmap;
creating a first checksum from the imaging unit server bitmap and a second checksum from the imaging unit bitmap; and
comparing the first checksum and second checksum with a processor.
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