US 11,914,298 B2
Liquid processing apparatus and method of detecting liquid in liquid processing apparatus
Yuichiro Kunugimoto, Koshi (JP); Takafumi Hayama, Koshi (JP); and Hidehiro Suzuki, Koshi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Sep. 10, 2020, as Appl. No. 17/016,643.
Claims priority of application No. 2019-165931 (JP), filed on Sep. 12, 2019.
Prior Publication US 2021/0080830 A1, Mar. 18, 2021
Int. Cl. G03F 7/16 (2006.01); H01L 21/67 (2006.01); B05B 15/50 (2018.01)
CPC G03F 7/162 (2013.01) [B05B 15/50 (2018.02); H01L 21/6715 (2013.01); H01L 21/67253 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A liquid processing apparatus comprising:
a stage on which a substrate is placed;
a nozzle configured to supply a processing liquid to the substrate placed on the stage and perform a processing on the substrate;
a nozzle holder configured to hold the nozzle;
a triple pipe connected to the nozzle holder and including an inner pipe, a middle pipe, and an outer pipe from an inner side to an outer side;
a capturing part configured to capture an image of the nozzle so as to acquire image data; and
a detector configured to detect a liquid level based on a plurality of the image data acquired by the capturing part at different timings within a period in which a supply of the processing liquid from the nozzle is not performed, wherein the liquid level is formed by the processing liquid or a liquid other than the processing liquid in a processing liquid flow path provided inside the nozzle,
wherein a temperature adjusting fluid for adjusting a temperature of the processing liquid is circulated through a first flow path between the outer pipe and the middle pipe and a second flow path between the middle pipe and the inner pipe by a pump,
wherein the pump is configured to suction the temperature adjusting fluid from the first flow path and eject the temperature adjusting fluid toward the second flow path periodically so that the temperature adjusting fluid pulsates in the first flow path and the second flow path, and
wherein the nozzle is vibrated in a vertical direction by the periodic suction and ejection of the pump.