CPC G03F 1/86 (2013.01) [G03F 7/70625 (2013.01); G03F 7/70633 (2013.01); H01L 21/0273 (2013.01); H10B 12/00 (2023.02)] | 19 Claims |
1. A device comprising:
a mat in a device area having four sides, wherein the mat includes at least a first layer of photoresist and a second layer of photoresist disposed on the first layer;
a plurality of extensions in the first layer that extend beyond the sides of the mat, wherein each of the extensions in the first layer includes a first layer metrology target, and wherein the first layer metrology targets have a relaxed pitch less than a device pitch in the second layer of the mat; and
wherein the second layer defines a pattern of apertures and the second layer covers at least part of each of the first layer metrology targets.
|