US 11,914,285 B2
Pellicle frame body for flat panel display, and method for manufacturing same
Naoto Komura, Shizuoka (JP); Koichi Nakano, Shizuoka (JP); and Akira Iizuka, Shizuoka (JP)
Assigned to NIPPON LIGHT METAL COMPANY, LTD., Tokyo (JP)
Appl. No. 17/269,160
Filed by NIPPON LIGHT METAL COMPANY, LTD., Tokyo (JP)
PCT Filed Aug. 23, 2019, PCT No. PCT/JP2019/033109
§ 371(c)(1), (2) Date Feb. 17, 2021,
PCT Pub. No. WO2020/045299, PCT Pub. Date Mar. 5, 2020.
Claims priority of application No. 2018-159005 (JP), filed on Aug. 28, 2018.
Prior Publication US 2021/0240072 A1, Aug. 5, 2021
Int. Cl. G03F 1/64 (2012.01)
CPC G03F 1/64 (2013.01) 8 Claims
OG exemplary drawing
 
1. A pellicle frame body for flat panel display (FPD), comprising:
a stainless-steel member; and
a transparent oxide coating in direct contact with the stainless-steel member,
wherein a film thickness of the transparent oxide coating is 420 nm to 700 nm.