US 11,914,265 B2
Folded waveguide phase shifters
Huan-Neng Chen, Taichung (TW); Chewn-Pu Jou, Hsinchu (TW); Lan-Chou Cho, Hsinchu (TW); and Feng-Wei Kuo, Zhudong Township (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed on Aug. 4, 2022, as Appl. No. 17/881,434.
Application 17/881,434 is a continuation of application No. 16/952,602, filed on Nov. 19, 2020, granted, now 11,454,857.
Application 16/952,602 is a continuation of application No. 16/532,270, filed on Aug. 5, 2019, granted, now 10,845,670.
Claims priority of provisional application 62/719,558, filed on Aug. 17, 2018.
Prior Publication US 2022/0373854 A1, Nov. 24, 2022
Int. Cl. G02F 1/025 (2006.01); G02F 1/225 (2006.01); G02F 1/017 (2006.01); G02F 1/21 (2006.01)
CPC G02F 1/2257 (2013.01) [G02F 1/01708 (2013.01); G02F 1/025 (2013.01); G02F 1/212 (2021.01); G02F 2203/50 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A phase shifter, comprising:
a light input end;
a light output end;
a first semiconductor material;
a second semiconductor material different from the first semiconductor material, the second semiconductor material contacting the first semiconductor material along a boundary area, wherein the boundary area forms at least one discrete multi-pointed enclosed shape when viewed from a longitudinal cross sectional view extending from the light input end to the light output end, and wherein the boundary area extends from one end of a core width of the phase shifter to a second end of the core width of the phase shifter; and
a core and a cladding, wherein the core is part of a folded waveguide phase shifter in which light may propagate through from the light input end to the light output end.