CPC G01N 29/036 (2013.01) [G01N 29/2437 (2013.01); G01N 33/0027 (2013.01); H10N 30/302 (2023.02); H10N 30/306 (2023.02); G01N 2291/014 (2013.01); G01N 2291/021 (2013.01)] | 15 Claims |
1. A substance detection element comprising:
a supporting substrate;
a plate-shaped beam provided with a piezoelectric element, at least one end of the beam being fixed to the supporting substrate;
a detection electrode detecting information about a vibration frequency of the beam; and
a substance adsorption film changing a vibration frequency of the beam by adhesion of a sub stance,
wherein the substance adsorption film and the detection electrode are respectively provided at a same position on a front and a back of the beam.
|