US 11,913,906 B2
Substance detection device with improved efficiency
Kenji Ogata, Fukuoka (JP); and Shogo Kurogi, Fukuoka (JP)
Assigned to I-PEX Inc., Kyoto (JP)
Appl. No. 17/278,761
Filed by I-PEX Inc., Kyoto (JP)
PCT Filed Aug. 2, 2019, PCT No. PCT/JP2019/030447
§ 371(c)(1), (2) Date Mar. 23, 2021,
PCT Pub. No. WO2020/066295, PCT Pub. Date Apr. 2, 2020.
Claims priority of application No. 2018-182353 (JP), filed on Sep. 27, 2018; and application No. 2019-080654 (JP), filed on Apr. 22, 2019.
Prior Publication US 2022/0042949 A1, Feb. 10, 2022
Int. Cl. G01N 29/00 (2006.01); G01N 29/036 (2006.01); G01N 29/24 (2006.01); G01N 33/00 (2006.01); H10N 30/30 (2023.01)
CPC G01N 29/036 (2013.01) [G01N 29/2437 (2013.01); G01N 33/0027 (2013.01); H10N 30/302 (2023.02); H10N 30/306 (2023.02); G01N 2291/014 (2013.01); G01N 2291/021 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A substance detection element comprising:
a supporting substrate;
a plate-shaped beam provided with a piezoelectric element, at least one end of the beam being fixed to the supporting substrate;
a detection electrode detecting information about a vibration frequency of the beam; and
a substance adsorption film changing a vibration frequency of the beam by adhesion of a sub stance,
wherein the substance adsorption film and the detection electrode are respectively provided at a same position on a front and a back of the beam.