CPC G01N 1/2202 (2013.01) [B01L 3/5027 (2013.01); B01L 5/00 (2013.01); B06B 1/10 (2013.01); G01N 1/4077 (2013.01); G01N 15/0656 (2013.01); G01N 33/0004 (2013.01); G01N 2001/4094 (2013.01); G01N 2015/0053 (2013.01); G01N 2015/0693 (2013.01)] | 4 Claims |
1. A method comprising:
receiving a gas sample to a volume of an on-chip fine particle sensor;
generating by a microelectromechanical, MEMS, ultrasonic transducer a standing wave to the volume, said standing wave comprising at least one particle trapping zone for trapping particles carried by the gas sample; an
releasing, by the MEMS ultrasonic transducer, particles trapped to the at least one particle trapping zone by decreasing power of the standing wave to at least one lower power level, and/or switching off, by the MEMS ultrasonic transducer, the standing wave, wherein size of the released particles is controlled by the power level of the standing wave and/or a time the at least one particle trapping zone is switched off to release plural sets of particles at different times, each set having particles of a same size range,
wherein the on-chip fine particle sensor is configured to determine a particle size distribution of the gas sample on the basis of an arrival time distribution of the released particles.
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