US 11,913,778 B2
Recording medium, shape calculation method, and shape calculation device
Kazuki Hagihara, Yokohama Kanagawa (JP)
Assigned to Kioxia Corporation, Tokyo (JP)
Filed by Kioxia Corporation, Tokyo (JP)
Filed on Sep. 11, 2020, as Appl. No. 17/018,353.
Claims priority of application No. 2020-043358 (JP), filed on Mar. 12, 2020.
Prior Publication US 2021/0285761 A1, Sep. 16, 2021
Int. Cl. G01B 15/04 (2006.01)
CPC G01B 15/04 (2013.01) 20 Claims
OG exemplary drawing
 
1. A non-transitory recording medium that records a shape calculation program causing a computer to execute:
generating a first scattering profile obtained by irradiating a first structure on a substrate with an electromagnetic wave;
generating a second scattering profile calculated based on a second structure, the second structure being a structure simulated;
selecting at least a shape parameter, as a measuring target, from a plurality of shape parameters which define the second structure, and identifying factors of interest corresponding to the selected shape parameter among a plurality of factors from the second scattering profile, the plurality of factors being included in the second scattering profile and having information of scattered intensity;
creating a first data frame by extracting the factors of interest from the first scattering profile;
creating a second data frame by extracting the factors of interest from the second scattering profile;
fitting the first data frame and the second data frame; and
determining the shape of the first structure based on the fitting result.