US 11,913,563 B2
Temperature actuated valve and methods of use thereof
Shivaram Chandrashekar, Karnataka (IN); Pallab Karmakar, Karnataka (IN); Amit Sahu, Uttar Pradesh (IN); Kumaresan Nagarajan, Karnataka (IN); and Giridhar Kamesh, Karnataka (IN)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 30, 2021, as Appl. No. 17/565,882.
Prior Publication US 2023/0213109 A1, Jul. 6, 2023
Int. Cl. F16K 31/00 (2006.01); G05D 23/02 (2006.01); H01L 21/67 (2006.01); H01J 37/32 (2006.01)
CPC F16K 31/002 (2013.01) [G05D 23/02 (2013.01); H01L 21/67017 (2013.01); H01J 37/3244 (2013.01); H01J 37/32183 (2013.01); H01J 37/32724 (2013.01); H01J 2237/002 (2013.01); H01J 2237/2007 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A temperature actuated valve, comprising:
a stationary member and a movable member disposed within a housing, wherein the stationary member is configured to receive the movable member;
a first annular flow path defined between an outer surface of the stationary member and an inner surface of the housing;
a second flow path defined by and within the movable member;
at least one temperature actuated member comprising a first end seated against a base of the stationary member and a second end seated against a base of the movable member, wherein the at least one temperature actuated member comprises a shape memory alloy; and
a bias member comprising a first end connected to the base of the stationary member and a second end connected to the base of the movable member,
the at least one temperature actuated member configured to compress at a first temperature to reduce an opening to the second flow path and to expand at a second temperature to increase an opening to the second flow path.