CPC F16K 31/002 (2013.01) [G05D 23/02 (2013.01); H01L 21/67017 (2013.01); H01J 37/3244 (2013.01); H01J 37/32183 (2013.01); H01J 37/32724 (2013.01); H01J 2237/002 (2013.01); H01J 2237/2007 (2013.01)] | 20 Claims |
1. A temperature actuated valve, comprising:
a stationary member and a movable member disposed within a housing, wherein the stationary member is configured to receive the movable member;
a first annular flow path defined between an outer surface of the stationary member and an inner surface of the housing;
a second flow path defined by and within the movable member;
at least one temperature actuated member comprising a first end seated against a base of the stationary member and a second end seated against a base of the movable member, wherein the at least one temperature actuated member comprises a shape memory alloy; and
a bias member comprising a first end connected to the base of the stationary member and a second end connected to the base of the movable member,
the at least one temperature actuated member configured to compress at a first temperature to reduce an opening to the second flow path and to expand at a second temperature to increase an opening to the second flow path.
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