US 11,912,728 B2
Aluminum compounds and methods of forming aluminum- containing film using the same
Won Seok Han, Pyeongtaek-si (KR); Dong Hwan Ma, Seoul (KR); Sungwoo Ahn, Yangju-si (KR); Dae-young Kim, Pyeongtaek-si (KR); and Wonyong Koh, Daejeon (KR)
Assigned to UP CHEMICAL CO., LTD., Pyeongtaek-si (KR)
Filed by UP CHEMICAL CO., LTD., Pyeongtaek-si (KR)
Filed on Jan. 25, 2021, as Appl. No. 17/156,678.
Application 17/156,678 is a continuation of application No. PCT/KR2019/009494, filed on Jul. 30, 2019.
Claims priority of application No. 10-2018-0088333 (KR), filed on Jul. 30, 2018.
Prior Publication US 2021/0147450 A1, May 20, 2021
Int. Cl. C07F 5/06 (2006.01); C23C 16/30 (2006.01); C23C 16/455 (2006.01)
CPC C07F 5/069 (2013.01) [C23C 16/303 (2013.01); C23C 16/45527 (2013.01)] 11 Claims
 
1. An aluminum-containing compound, represented by the following Chemical Formula 2,

OG Complex Work Unit Chemistry
wherein, in the above Chemical Formula 2,
each of R1 and R2 is independently a linear or branched alkyl group having 1 to 3 carbon atoms, and
R3 is a linear or branched alkyl group having 4 or 5 carbon atoms, and
wherein the aluminum-containing compound is liquid at room temperature.