US 9,268,092 B1
Guided wave opto-acoustic device
Robert L. Jarecki, Jr., Albuquerque, NM (US); Peter Thomas Rakich, New Haven, CT (US); Ryan Camacho, Albuquerque, NM (US); Heedeuk Shin, Rochester, NY (US); Jonathan Albert Cox, Albuquerque, NM (US); Wenjun Qiu, Chicago, IL (US); and Zheng Wang, Austin, TX (US)
Assigned to Sandia Corporation, Albuquerque, NM (US)
Filed by Sandia Corporation, Albuquerque, NM (US)
Filed on Oct. 16, 2013, as Appl. No. 14/55,774.
Claims priority of provisional application 61/785,163, filed on Mar. 14, 2013.
Int. Cl. G02F 1/01 (2006.01); G02B 6/26 (2006.01); G02F 1/125 (2006.01); G02F 1/11 (2006.01); G02B 6/122 (2006.01)
CPC G02B 6/26 (2013.01) [G02B 6/1225 (2013.01); G02F 1/11 (2013.01); G02F 1/125 (2013.01); G02B 6/122 (2013.01)] 5 Claims
OG exemplary drawing
1. A method for making an acousto-optical device, comprising:
depositing an insulating layer on a substrate;
forming a waveguiding member on the insulating layer;
depositing a membrane layer on the insulating layer and on the waveguiding member such that the deposited membrane layer abuts and overlies the waveguiding member;
removing such of the membrane layer as overlies the waveguiding member;
patterning the membrane layer so as to define therein at least one longitudinally extensive phononic resonator traversed by the waveguiding member; and
removing at least a portion of the insulating layer that underlies the membrane layer, including such portion as underlies the longitudinally extensive phononic resonator or resonators.