US 11,895,903 B2
Method of forming perovskite thin film and light-emitting device including layer manufactured thereby
Yoonseok Ka, Yongin-si (KR); Dongchan Kim, Yongin-si (KR); Jiyoung Moon, Yongin-si (KR); and Heechang Yoon, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Oct. 20, 2021, as Appl. No. 17/506,448.
Claims priority of application No. 10-2021-0046090 (KR), filed on Apr. 8, 2021.
Prior Publication US 2022/0344591 A1, Oct. 27, 2022
Int. Cl. H01L 23/00 (2006.01); H10K 71/15 (2023.01); C09K 11/61 (2006.01); H10K 50/15 (2023.01); H10K 50/16 (2023.01); H10K 50/17 (2023.01); H10K 71/00 (2023.01)
CPC H10K 71/15 (2023.02) [C09K 11/616 (2013.01); H10K 50/15 (2023.02); H10K 50/16 (2023.02); H10K 50/17 (2023.02); H10K 71/00 (2023.02)] 18 Claims
OG exemplary drawing
 
1. A method of forming a perovskite thin film, the method comprising:
preparing a substrate;
spraying a first solution of a first perovskite compound precursor through an inner nozzle of a dual nozzle including the inner nozzle and an outer nozzle;
spraying a second solution of a second perovskite compound precursor through the outer nozzle;
forming a perovskite compound solution by reacting the first solution of the first perovskite compound precursor and the second solution of the second perovskite compound precursor;
forming a membrane on the substrate from the perovskite compound solution; and
evaporating a solvent of the perovskite compound solution from the membrane on the substrate.