US 11,895,741 B2
Multi-zone pedestal heater having a routing layer
Kevin Ptasienski, O'Fallon, MO (US); Stanton Hopkins Breitlow, Winona, MN (US); Mohammad Nosrati, Redwood City, CA (US); Kevin Smith, Columbia, MO (US); Brittany Phillips, St. Louis, MO (US); Ken Ames, San Jose, CA (US); Patrick Margavio, Columbia, MO (US); and Kurt English, Columbia, MO (US)
Assigned to WATLOW ELECTRIC MANUFACTURING COMPANY, St. Louis, MO (US)
Filed by Watlow Electric Manufacturing Company, St. Louis, MO (US)
Filed on Jun. 6, 2022, as Appl. No. 17/832,890.
Application 17/832,890 is a continuation of application No. 16/196,699, filed on Nov. 20, 2018, granted, now 11,382,180.
Claims priority of provisional application 62/589,023, filed on Nov. 21, 2017.
Prior Publication US 2022/0338305 A1, Oct. 20, 2022
Int. Cl. H05B 3/06 (2006.01); H05B 3/28 (2006.01); H05B 1/02 (2006.01); H01L 21/67 (2006.01); H01L 23/522 (2006.01); H01L 23/485 (2006.01); C23C 16/458 (2006.01); H01L 21/687 (2006.01)
CPC H05B 3/06 (2013.01) [C23C 16/4586 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H01L 21/68735 (2013.01); H01L 21/68757 (2013.01); H01L 23/485 (2013.01); H01L 23/522 (2013.01); H05B 1/0202 (2013.01); H05B 1/0233 (2013.01); H05B 3/28 (2013.01); H05B 2203/005 (2013.01); H05B 2203/007 (2013.01); H05B 2203/014 (2013.01); H05B 2203/016 (2013.01); H05B 2203/035 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A support pedestal comprising:
a support member including a resistive layer having a plurality of zones, a routing layer, and a plurality of conductive vias, wherein:
the plurality of zones are defined by a plurality of independently controllable resistive heating elements, and
the resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of conductive vias; and
a plurality pairs of electric terminals, each pair of electric terminals connected to a corresponding one of the plurality of independently controllable resistive heating elements via the routing layer and a corresponding pair of the plurality of conductive vias.