CPC H05B 3/06 (2013.01) [C23C 16/4586 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H01L 21/68735 (2013.01); H01L 21/68757 (2013.01); H01L 23/485 (2013.01); H01L 23/522 (2013.01); H05B 1/0202 (2013.01); H05B 1/0233 (2013.01); H05B 3/28 (2013.01); H05B 2203/005 (2013.01); H05B 2203/007 (2013.01); H05B 2203/014 (2013.01); H05B 2203/016 (2013.01); H05B 2203/035 (2013.01)] | 20 Claims |
1. A support pedestal comprising:
a support member including a resistive layer having a plurality of zones, a routing layer, and a plurality of conductive vias, wherein:
the plurality of zones are defined by a plurality of independently controllable resistive heating elements, and
the resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of conductive vias; and
a plurality pairs of electric terminals, each pair of electric terminals connected to a corresponding one of the plurality of independently controllable resistive heating elements via the routing layer and a corresponding pair of the plurality of conductive vias.
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