CPC H03H 9/173 (2013.01) [H03H 3/02 (2013.01); H03H 9/02118 (2013.01); H03H 2003/021 (2013.01); Y10T 29/42 (2015.01)] | 8 Claims |
1. A bulk acoustic wave resonator (BAWR), comprising:
a bulk acoustic wave resonance unit comprising a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode;
an air gap disposed below the bulk acoustic wave resonance unit;
an air edge formed at a distance from a center of the bulk acoustic wave resonance unit; and
a frame aligned over an outer portion of the first electrode in the bulk acoustic wave resonance unit.
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