US 11,894,828 B2
Boundary acoustic wave device
Hiroyuki Nakamura, Osaka-Fu (JP); Rei Goto, Osaka (JP); and Keiichi Maki, Suita (JP)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Irvine, CA (US)
Filed on Apr. 11, 2019, as Appl. No. 16/381,567.
Claims priority of provisional application 62/659,568, filed on Apr. 18, 2018.
Prior Publication US 2019/0326874 A1, Oct. 24, 2019
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/02 (2006.01); H03H 9/54 (2006.01); H03H 9/05 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01); H03H 9/64 (2006.01); H03H 9/46 (2006.01); H03F 3/24 (2006.01); H04B 1/00 (2006.01)
CPC H03H 9/0222 (2013.01) [H03F 3/24 (2013.01); H03H 9/02559 (2013.01); H03H 9/02574 (2013.01); H03H 9/02834 (2013.01); H03H 9/02866 (2013.01); H03H 9/058 (2013.01); H03H 9/145 (2013.01); H03H 9/25 (2013.01); H03H 9/465 (2013.01); H03H 9/54 (2013.01); H03H 9/64 (2013.01); H03H 9/6489 (2013.01); H04B 1/0057 (2013.01); H03F 2200/451 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic wave device comprising:
a piezoelectric layer;
an interdigital transducer electrode on the piezoelectric layer;
high velocity layers on opposing side of the piezoelectric layer, the high velocity layers including a first high velocity layer having a first acoustic velocity and a second high velocity layer having a second acoustic velocity;
a temperature compensation layer in physical contact with the interdigital transducer electrode and positioned between the first high velocity layer and the piezoelectric layer; and
an adhesion layer within the temperature compensation layer such that the adhesion layer is positioned between a first portion of the temperature compensation layer and a second portion of the compensation layer, the adhesion layer arranged to enhance power durability of the acoustic wave device, the acoustic wave device being configured to generate a boundary acoustic wave such that acoustic energy is concentrated at an interface of the piezoelectric layer and the temperature compensation layer, the boundary acoustic wave having a velocity that is less than both the first acoustic velocity and the second acoustic velocity, the boundary acoustic wave having a wavelength of λ, and the thickness of the second high velocity layer being at least 10λ.